D-050 • D-100 Capacitive Sensors

Subnanometer-Resolution Position Sensors

  • For applications with the highest precision requirements
  • Measuring range to 300 µm
  • Resolution to 0.01 nm
  • Linearity error to 0.01% with digital controller
  • E-509.CxA control electronics, compatible with E-500 piezo controller system
D-050 • D-100 Capacitive Sensors
Description du produit Spécifications Téléchargements Devis / Commande

Resolution

Capacitive sensors achieve resolutions into the picometer range over shorter distances. The theoretical measuring resolution is unlimited. In practice, scatter radiation, geometrical effects, and the measuring electronics noise influence the achievable accuracy. In conjunction with the E-509.C1A electronics, the effective noise factor of the D-100.00 sensors (100 µm) is 0.02 nm/√Hz. Corresponds for example, to a resolution of 0.2 nm with 100 Hz bandwidth. The jumper-adjustable bandwidth of the electronics is up to 3 kHz.

In addition to the standard sensors listed here, PI offers customized versions, e.g., in measuring, geometry, material, electronics etc.

Application fields

High-precision positioning.

Specifications

Datasheet

Datasheet D-050 • D-100

Version / Date
2022-08-31
pdf - 517 KB
Version / Date
2022-08-31
pdf - 519 KB
Version / Date
2018-06-18
pdf - 860 KB

Downloads

Product Note

Product Note

Product Change Notification D-015

Version / Date
2021-12-20
pdf - 111 KB
Anglais

Datasheet

Datasheet

Datasheet D-050 • D-100

Version / Date
2022-08-31
pdf - 517 KB
Version / Date
2022-08-31
pdf - 519 KB
Version / Date
2018-06-18
pdf - 860 KB

Documentation

Documentation

User Manual PZ106

D-015, D-050, D-100 Capacitive Sensors

Version / Date
2003-11-05
pdf - 228 KB
Anglais

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