Precision Z stage suitable for vacuum; 2-phase stepper motor; 26 mm travel range; 55 N load capacity; 7.5 mm/s maximum velocity; ball screw; incremental linear encoder, 20 µm sensor signal period, sin/cos, 1 V peak-peak; vacuum-compatible to 10-6 hPa
L-310 V6 Precision Z Stage Suitable for Vacuum
Compact Integration with Linear and Rotation Stages
- Suitable for vacuum up to 10-6 hPa
- Travel range 26 mm (1")
- High-resolution encoder
- Stepper motor
- Zero-play ball screw
- Load capacity to 5.5 kg
Precision-class Z stage
High guide accuracy and stiffness due to ball screws and crossed roller guides. Stress-relieved aluminum base for high stability. Noncontact limit and reference switches (Hall effect). Reference switch with direction sensing in the middle of the travel range. Integrated linear encoder, installed centrically.
Applications and use cases
Vacuum chambers
Research
Beamline instrumentation
Microscopy
Electronics assembly and inspection
Technology
Drive type: 2-phase stepper motor for high torque even at low velocities and high resolution.
Position measuring: Noncontact optical linear encoders measure the position directly at the platform with the greatest accuracy. Nonlinearity, mechanical play or elastic deformation have no influence on the measurement.
Reduced outgassing especially for use in vacuum environments: In particular, the guide and the spindle are lubricated using a very low-outgassing substance. This allows a bakeout temperature of up to 80 °C. This and other modifications to the PI V6 vacuum class make it possible to use this positioner at up to 10-6 hPa.
Specifications
Datasheet L-310-V
Specifications
Positioning | Unit | Tolerance | L-310.021211V6 |
|---|---|---|---|
Minimum incremental motion | µm | typ. | 0.05 |
Unidirectional repeatability | µm | typ. | ±0.05 |
Bidirectional repeatability | µm | typ. | 0.4 |
Reference switch |
|
| Hall effect, N/C contact, 5 V, NPN |
Reference switch repeatability | µm |
| 2 |
Limit switch |
|
| Hall effect, N/C contact, 5 V, NPN |
Integrated sensor |
|
| Incremental linear encoder |
Sensor signal |
|
| Sin/cos, 1 V peak-to-peak |
Sensor signal period | µm |
| 20 |
Mechanical properties | Unit | Tolerance | L-310.021211V6 |
|---|---|---|---|
Permissible push force in X | N | max. | 100 |
Permissible push force in Y | N | max. | 50 |
Permissible push force in Z | N | max. | 55 |
Permissible torque in θX | Nm | max. | 40 |
Permissible torque in θY | Nm | max. | 80 |
Permissible torque in θZ | Nm | max. | 80 |
Holding force in Z, passive | N |
| 50 |
Moved mass in Z, unloaded | kg |
| 0.9 |
Drive screw type |
|
| Ball screw |
Spindle pitch | mm |
| 1 |
Guide |
|
| Crossed roller guide |
Overall mass | kg |
| 2.6 |
Material |
|
| Anodized aluminum |
At PI, technical data is specified at 22 ±3 °C. Unless otherwise stated, the values are for unloaded conditions. Some properties are interdependent. The designation "typ." indicates a statistical average for a property; it does not indicate a guaranteed value for every product supplied. During the final inspection of a product, only selected properties are analyzed, not all. Please note that some product characteristics may deteriorate with increasing operating time.
Downloads
Datasheet
Datasheet L-310-V
Documentation
User Manual L310T0005
L-310.021211V6
Short Instructions MP146EK
Positioners with Electric Motors: DT-xx / HPS-170 / L-xxx / LS-xxx / PRS-xxx / RS-40 / UPL-120 / VT-80 / WT-xx / WT-xxx
3D Models
L-310.021211V6 3D model
Ask for a free quote on quantities required, prices, and lead times or describe your desired modification.
Accessories
AB-65 L mounting bracket for vertical mounting of linear and rotation stages; aluminum, blank; vacuum-compatible to 10-9 hPa
Vacuum feedthrough, D-sub 15 (m/f), suitable for high vacuum (to 10-6 hPa)
Vacuum feedthrough, HD D-sub 26 (m/f), suitable for high vacuum (to 10-6 hPa)
Vacuum feedthrough, D-sub 9 (m/f), suitable for high vacuum (to 10-6 hPa)
Vacuum feedthrough, CF40 flange, 1 × D-sub 15 (m/m), suitable for high vacuum (to 10-7 hPa) and ultrahigh vacuum (to 10-9 hPa)
Vacuum feedthrough, CF63 flange, 3 × D-sub 15 (m/m), suitable for high vacuum (to 10-7 hPa) and ultrahigh vacuum (to 10-9 hPa)
Vacuum feedthrough, CF100 flange, 6 × D-sub 15 (m/m), suitable for high vacuum (to 10-7 hPa) and ultrahigh vacuum (to 10-9 hPa)
Vacuum feedthrough, CF160 flange, 15 × D-sub 15 (m/m), suitable for high vacuum (to 10-7 hPa) and ultrahigh vacuum (to 10-9 hPa)
Vacuum feedthrough, CF63 flange, 1 × D-sub 9 (m/m) and 1 x D-sub 15 (m/m), suitable for high vacuum (to 10-7 hPa) and ultrahigh vacuum (to 10-9 hPa)
Vacuum feedthrough, CF100 flange, 3 × D-sub 9 (m/m) and 3 x D-sub 15 (m/m), suitable for high vacuum (to 10-7 hPa) and ultrahigh vacuum (to 10-9 hPa)
Vacuum feedthrough, CF160 flange, 6 × D-sub 9 (m/m) and 6 x D-sub 15 (m/m), suitable for high vacuum (to 10-7 hPa) and ultrahigh vacuum (to 10-9 hPa)
AB-65 L mounting bracket, vacuum-compatible to 10-9 hPa
Mounting bracket for vertical mounting of positioners up to 100 mm in width and up to 300 mm in length; vacuum-compatible to 10-6 hPa
Mounting bracket for vertical mounting of positioners up to 100 mm in width and up to 300 mm in length; vacuum-compatible to 10-9 hPa
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Technologie

Moteurs électriques rotatifs
Les moteurs électriques rotatifs tels que les moteur DC ou moteurs pas à pas sont utilisés en liaison avec des entraînements à vis.

Vide
Manipulation précautionneuse, locaux adéquats : PI dispose non seulement de l'équipement nécessaire pour la qualification de matériaux, de composants et de produits finis mais s'appuie aussi sur de nombreuses années d'expérience en matière de systèmes de positionnement sous vide et ultra vide.











