Product Series with Vacuum-Ready Items

PI offers specific catalogue items for selected product series that are already suitable for high vacuum (HV) or ultra-high vacuum (UHV).

Furthermore, most of the PI axes and multi-axis solutions can be modified on request for use in vacuum. You can find more information on PI‘s Design-for-Vacuum on the >> Vacuum technology page.

Hexapods

H-850.V Vacuum-Compatible 6-Axis Hexapod

For loads to 80 kg
  • Travel ranges X/Y/Z [mm]: ±50/±50/±25
  • Max. load horiz./any [kg]: 80/40
  • Min. incr. motion X/Y/Z [µm]: 0.3/0.3/0.2
  • Holding force horiz./any [N]: 2000/500
  • Vacuum compatible [hPa]: 10-6

H-811.I2V Vacuum-Compatible 6-Axis Miniature Hexapod

Fast, Compact, and Highly Precise
  • Travel ranges X/Y/Z [mm]: ±17/±16/±6.5
  • Max. load horiz./any [kg]: 5/2.5
  • Max. velocity [mm/s]: 10
  • Min. incr. motion X/Y/Z [µm]: 0.2/0.2/0.08
  • Vacuum compatible [hPa]: 10-6

H-824.V Vacuum-Compatible 6-Axis Hexapod

Compact and Precise
  • Travel ranges X/Y/Z [mm]: ±22.5/±12.5/±7.5
  • Max. load horiz./any [kg]: 5/2.5
  • Max. velocity X/Y/Z [mm/s]: 12.5
  • Min. incr. motion X/Y/Z [µm]: 0.3/0.3/0.3
  • Vacuum compatible [hPa]: 10-6

Linear, Rotation, Elevation Stages and Accessories

RS-40 V7 Compact Rotation Stage Suitable for Vacuum

Precision Positioning

M-110 • M-111 • M-112 V6 Vacuum-Compatible Compact Linear Stage

XY(Z) Combinations with DC Gear Motor, Various Travel Range Variants

VT-80 V6 Linear Stage Suitable for Vacuum

Basic Version for Universal Fields of Use

L-611 V6 • V7 • V9 Precision Rotation Stage Suitable for Vacuum

High Travel Accuracy

L-509 V6 • V7 • V9 Precision Linear Stage Suitable for Vacuum

Compact Design, for Loads to 10 kg

L-310 V6 Precision Z Stage Suitable for Vacuum

Can be Compactly Combined with Linear and Rotation Stages
PI L-500

L-500 Adapter Bracket

For Vertical Mounting of Linear and Rotation Stages
Adapter Bracket

AB-65 Adapter Bracket

For Vertical Mounting of Linear and Rotation Stages
VFxx Vacuum Feedthroughs

C-815.VFxx Vacuum Feedthroughs

Interfaces Between Air Side and High Vacuum (HV) or Ultrahigh Vacuum (UHV)
NOUVEAU

P-891.VA • P-892.VA Vacuum Feedthrough

Accessories for Vacuum-Compatible Piezo Positioners

L-220 V6 High-Resolution Linear Actuator Suitable for Vacuum

Suitable for High Cycle Numbers

Piezo Actuators and Stages

P-621.1U • P-625.1U PIHera Linear Precision Positioner

Vacuum Compatible and with Variable Travel Ranges and Axis Configuration
Preloaded Piezo Actuators

P-841 Preloaded Piezo Actuators

Compact Actuators for High Loads and Forces, with Position Sensor

P-733.3 XYZ Piezo Nanopositioner

High-Precision XYZ Scanner with Aperture

P-733.2 XY Piezo Nanopositioner

High-Precision XY Scanner with Aperture

P-216 PICA Power Piezo Actuator

Preloaded Piezo Actuators (HVPZT) with Sensor Option

P-212 PICA Power Piezo Actuator

Preloaded Piezo Actuators (HVPZT) with Sensor Option

P-845 Preloaded Piezo Actuators

For High Loads and Forces, with Position Sensor

P-844 Preloaded Piezo Actuators

For High Loads and Forces

P-843 Preloaded Piezo Actuators

For High Loads and Forces, with Position Sensor

P-842 Preloaded Piezo Actuators

For High Loads and Forces

P-840 Preloaded Piezo Actuators

Compact Actuators for High Loads and Forces

P-753 LISA Linear Actuator and Stage

Dynamic and Stable in Position

P-561 • P-562 • P-563 PIMars Nanopositioning Stage

High-Precision Nanopositioner for up to 3 Axes

P-518 • P-528 • P-558 Piezo Z/Tip/Tilt Stage

High Dynamics with Large Aperture

P-363 PicoCube XY(Z) Piezo Scanner

Dynamic Nanopositioner for Scanning Probe Microscopy

P-235 PICA Power Piezo Actuators

Preloaded High-Load Piezo Actuators (HVPZT) with Sensor Option

P-225 PICA Power Piezo Actuators

Preloaded High-Load Piezo Actuators (HVPZT) with Sensor Option

N-480 High-Precision Kinematic Mirror Mount

With N-470 PiezoMike Linear Actuators

N-470.V PiezoMike Linear Actuator

Minimum Dimensions, High Forces, Stable Positioning, Vacuum to 10-6 hPa

Sensors

Capacitive Sensors

D-015 • D-050 • D-100 Capacitive Sensors

Subnanometer-Resolution Position Sensors