- 365 mm diameter motion platform, 260 mm diameter aperture
- Low profile
- Eccentricity and flatness < 300 nm
The directly driven flat rotation stages of the PIglide RLA series are designed for the highest precision. They have a low profile and a large clear aperture. The RLA stages offer a superior travel accuracy, flatness, and wobble performance.
3-Phase torque motor
- Low cogging torque
Absolute encoder (optional)
Absolute encoders supply explicit position information that enables immediate determination of the position. This means that referencing is not required during switch-on, which increases efficiency and safety during operation.
Accessories and options
- Incremental or absolute encoder
- PIglide filter and air preparation kit
- Single or multi-axis motion controllers and servo drives
- Multi-axis/customized setups
- Base plates made of granite and systems for reducing vibration
Tomography, beamline systems, wafer metrology, wafer inspection, measuring technology, inspection systems, calibration, scanning.
Thanks to the friction-free motion, no particles are formed, which makes PIglide stages ideal for cleanroom applications.
User Manual A688D0001
A-688 Series Large Clear Aperture Rotary Air Bearing Stage
3-D model A-68x
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