M-971 Motorized OEM XY Stage
Low Price with High Quantities
- XY stage for the price-sensitive applications
- Precise stepper motors
- Crossed roller guides
- Limit and reference switches (Hall effect)
XY stage for the price-sensitive OEM market
The M-971 is integrated into systems for inspection, lithography, or biomedical engineering and is optimized for optical microscopy. It was specially developed to meet the requirements of price-sensitive OEM markets. Proven and cost-optimized components form its basis:
- The design of the guides which includes several short crossed roller guides distributes the load evenly over a large surface and ensures high stiffness and good travel accuracy.
- The drivetrain is based on a widely used linear stage from PI. Its reliability and long lifetime have been proven in use for years.
- By using stepper motors, encoders can be dispensed with and a simple stepper motor controller can be used. The XY stage is equipped with limit and reference switches to ensure fast and precise referencing and safety during operation.
Specifications
Datasheet M-971
Specifications
Motion and positioning | Unit | Tolerance | M-971.01 |
---|---|---|---|
Active axes | X, Y | ||
Travel range in X | mm | 50 | |
Travel range in Y | mm | 25 | |
System resolution in X | nm | 2.5 | |
System resolution in Y | nm | 2.5 | |
Minimum incremental motion in X | µm | Typ. | 0.2 |
Minimum incremental motion in Y | µm | Typ. | 0.2 |
Unidirectional repeatability in X | µm | Typ. | 1 |
Unidirectional repeatability in Y | µm | Typ. | 1 |
Backlash in X | µm | Typ. | 6 |
Backlash in Y | µm | Typ. | 6 |
Velocity in X | mm/s | Max. | 10 |
Velocity in Y | mm/s | Max. | 10 |
Reference switch | Hall effect | ||
Reference switch repeatability | µm | Typ. | 1 |
Limit switches | Hall effect | ||
Rotational crosstalk in θY with motion in X | µrad | Typ. | ±50 |
Rotational crosstalk in θZ with motion in X | µrad | Typ. | ±50 |
Rotational crosstalk in θX with motion in Y | µrad | Typ. | ±50 |
Rotational crosstalk in θZ with motion in Y | µrad | Typ. | ±50 |
Downloads
Datasheet
Datasheet M-971
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